Integrated Simulation for MEMS: Coupling Flow-Structure- Thermal-Electrical Domains

5.1 Abstract 5.2 Introduction Full-System Simulation • Computational Complexity of MEMS Flows • Coupled-Domain Problems • A Prototype Problem 5.3 Coupled Circuit-Device Simulation 5.4 Overview of Simulators The Circuit Simulator: SPICE3 • The Fluid Simulator: NεκTαr • Formulation for Flow-Structure Interactions • Grid Velocity Algorithm • The Structural Simulator • Differences between Circuit, Fluid and Solid Simulators 5.5 Circuit-Microfluidic Device Simulation Software Integration • Lumped Element and Compact Models for Devices 5.6 Demonstrations of the Integrated Simulation Approach Microfluidic System Description • SPICE3–NεκTαr Integration • Simulation Results 5.7 Summary and Discussion Acknowledgments